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ETH Zurich, Swiss Federal Institute of Technology
Mission Rapid, contactless, in-situ metrology at the nanometer scale is of crucial importance for many micromechanical, microelectronical, and biological, structures and devices. Laser acoustic methods represent an ideal approach for the translation of micrometer-light-waves into mechanical waves length in the order of less than 10 nanometers and vice versa, thus enabling real time tomography at the nanometer scale. The development of such metrology is our mission which we accomplish at our university based labs in cooperation with academic and industrial partners.
People Dr. Jacqueline Vollmann, Jürg Bryner, Laurent Aebi, Dr. Dieter M. Profunser, Prof. Dr. Jürg Dual
Recent Publications J. Bryner, J. Vollmann, L. Aebi, J. Dual, T. Kehoe, C.
Sotomayor Torres, 'Characterization of nanoimprinting polymer films using
picosecond ultrasonics', IEEE Ultrasonics Proceedings,
New York,
2007. L. Aebi, K. Löffel, J. Vollmann, J. Dual, 'Frequency
selective wave popagation in graded materials',
IEEE Ultrasonics Proceedings, New
York,
2007. L. Aebi, K. Löffel, J. Vollmann, J. Dual, 'Validation of
an algorithm for wave propagation in graded materials with analytical solution', SPIE Proceedings Vol
6616, June
2007. J. Bryner, J. Vollmann, D.M. Profunser, J. Dual, 'Simulation
of the elastic wave propagation in anisotropic microstructures', SPIE Proceedings Vol
6616, June
2007. J. Bryner, J.Vollmann, G. Bugnard, J. Dual, '3-D wave
propagation in anisotropic microstructures with tilted orthotropic axes',
Proceedings of the International Congress on Ultrasonics 2007,
Vienna, Austria, April 2007. L. Aebi, K. Löffel, J. Vollmann, J. Dual, 'One-dimensional
wave propagation in graded materials',
Proceedings of the International Congress on Ultrasonics 2007,
Vienna, Austria, April 2007. J. Vollmann, J. Bryner, L. Aebi, N. Bochud, J. Dual, 'Elastodynamic
waves in radially graded and layered cylindrical structures',
Proceedings of the International Congress on Ultrasonics 2007,
Vienna, Austria, April 2007. J. Bryner, J. Vollmann, D.M. Profunser, J. Dual, 'Elastic
wave propagation in anisotropic microstructures for the interpretation of
laser acoustic measurements', IEEE Ultrasonics Proceedings,
ISBN: 1-4244-0202-6, pp. 772-775,
Vancouver, Canada, 2006. J. Vollmann, J. Bryner, L. Aebi, J. Dual, 'Guided
elastodynamic waves in radially graded cylindrical structures', IEEE Ultrasonics Proceedings,
ISBN: 1-4244-0202-6, pp. 792-795,
Vancouver, Canada, 2006. J. Vollmann, D.M.
Profunser, J. Bryner, J. Dual, ‘Elastodynamic
wave propagation in graded materials; simulations, experiments, phenomena, and
applications’, Ultrasonics, Vol. 44,
pp. e1215-e1221, Elsevier Science, Amsterdam, 2006. J. Bryner, D.M.
Profunser, J. Vollmann, E. Müller, J. Dual, ‘Characterization of Ta and TaN
diffusion barriers beneath Cu layers using picosecond ultrasonics’, Ultrasonics,
Vol. 44, pp. e1269-e1275, Elsevier Science, Amsterdam, 2006. L.Aebi, J. Vollmann, J. Dual, 'Two-dimensional
elastodynamic wave propagation in graded structures',
III European Conference on Computational Mechanics, Lisbon,
Portugal, 2006. D.M. Profunser, J. Vollmann, J. Bryner, J. Dual, 'Mechanical
characterization of Ta and TaN diffusion barrier layers using laser acoustics',IEEE
Ultrasonics Proceedings,
Rotterdam, The Netherlands,
2005. D.M.
Profunser, ‘Laserbased Ultrasound for Characterization of Thin Films and
Microstructures and Resulting Applications’, PhD
Dissertation, Swiss Federal Institute of Technology, Zurich, Switzerland, 2004. J. Vollmann, D.M.
Profunser, A.H. Meier, M. Döbeli, J. Dual, ‘Pulse
laser acoustics for the characterization of inhomogeneities
at interfaces of microstructures’, Ultrasonics,
Vol. 42, pp. 657-663, Elsevier Science, Amsterdam, 2004. D.M. Profunser, J.
Vollmann, J. Dual, ‘Determination of the material
properties of microstructures by laserbased
ultrasound’, Ultrasonics,
Vol. 42, pp. 641-646, Elsevier Science, Amsterdam, 2004. J.
Vollmann, D.M. Profunser, and J. Dual, ‘Laser
induced acoustic pulse propagation in submicron metallic thin films having
variable sound velocities’, Review of Scientific Instruments, Vol. 74, No. 1,
pp. 851-853, American Institute of Physics, January 2003 J.Vollmann,
D.M. Profunser, and J. Dual, ‘Sensitivity improvement of a pump-probe set-up
for thin film and microstructure metrology’, Ultrasonics Vol. 40/1-8, pp.
757-763, Elsevier Science, Amsterdam, 2002. D.M.
Profunser, J. Vollmann, and J. Dual, ‘Ultrasonic wave propagation in focusing
tips with arbitrary geometries’, Ultrasonics Vol. 40/1-8, pp. 747-752, Elsevier
Science, Amsterdam, 2002. D.M. Profunser, J.
Vollmann, J. Bryner, J. Dual, ‘Measurement
and simulation of the laserbased thermo-elastic
excitation and propagation of acoustic pulses for thin film and MEMS
inspection‘,
SPIE Proceedings, Vol. 4703, pp. 21-30, June 2002. J. Vollmann, D.M. Profunser, and J. Dual, 'High resolution measurement of thin metallic films and multi-layers by femtosecond laser pulses', Laser in Metrology and Art Conservation, Microsystems Engineering: Metrology and Inspection, SPIE Proceedings Vol. 4400, pp. 82-89, October 2001. D.M. Profunser, J. Vollmann, and J. Dual, 'Resolution Improvement of pulsed Laser Experiments with a micro-optomechanical focusing Tip', Laser in Metrology and Art Conservation, Microsystems Engineering: Metrology and Inspection, SPIE Proceedings Vol. 4400, pp. 102-110, October 2001. J. Vollmann, D.M. Profunser, and J. Dual, 'Femtosecond Ultrasonics for the Characterization of Layered Micro- and Nano Structures’, Material Research Society Symposium Vol. 634, pp B3.3.1-B3.3.5, MRS, Warrendale, PA, 2000.
Patents Jacqueline Vollmann,
Dieter M. Profunser, Jürg Dual, 'Device for
filtering electrical high frequency signals', International Patent Application,
PCT/CH 02/00605, ETH Zürich,
Zürich, Switzerland, November 2002.
A supplier's opinion 'A Survey of Methods
using Balanced Photodetection', New Focus, 2584 Junction
Avenue, San Jose, CA 95134, USA, 2003
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