Links
Nanosonic Group at ETH Zurich
Micro- and Nanosystems Group at ETH Zurich
Institute of Robotics and Intelligent Systems
[Top]
ATV Technologie GmbH: High temperature quarz ofen
Karl Suess GmbH: Mask-Bondaligner, Substratbonder
TePla Inc.: Plasmaasher
STS Inc: Dry etching systems
high tech trade gmbh: spin coater
Moorfield: Evaporation and sputter system
Tousimis: Critical Point Dryer
Delvotec:
Wire Bonder (wedge-wedge)
