Equipment

Wet Benches

Photolithography Line

Tencor P10

Surface Profilometer

SB-6

Substrate Bonder

ATV PEO 603

High Temperature Oven

TePla 300 E

Plasma Asher

Nikon Optiphot-150S

Microscope

MA6/MB6

Maskaligner/Bondaligner

RC 5 GY

Spin Coater

HMDS

HMDS

BLE D020 E

Spin Coater

STS ICP

Inductive Coupled Plasma Etching System

STS RIE

Reactive Ion Etching System (SiO, SiN)

DELVOTEC 5425

Manual Wire Wedge Bonder

SET TC520

Wafer Probe Station

ESEC 8003

Dicing Saw

Waferscratcher

Waferscratcher

Edwards E 306

Electron-Beam evaporator, Sputter System

Freeze Dryer

Freeze Dryer