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MEMS Activities at IMES and CLA clean rooms
You will find on these pages an overview on the Micro Electro Mechanical Systems (MEMS) activities at the Institute of Mechanical Systems at ETH Zuerich. [Top] IMES / Mechanics ETH Center, CLA J 21.2 Phone: +41 (0) 44 632 7764 Fax: +41 (0) 44 632 1145 E-Mail: stefan.blunier@imes.mavt.ethz.ch [Top]
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