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Profunser,
D.M., Vollmann, J., Bryner, J., Dual J.
Measurement and simulation of the laser-based
thermo-elastic excitation and propagation of acoustic pulses for thin film and
MEMS inspection
Proc. SPIE Vol. 4703, p. 21-30, Nondestructive Evaluation
and Reliability of Micro- and Nanomaterial Systems, June 2002
Abstract
Optical techniques for monitoring acoustic waves excited in thin films or
micro-structures with ultrashort laser pulses are useful for the accurate and
nondestructive evaluation as well as for the characterization of material
properties. The pump-probe laser-based acoustic methods generate acoustic bulk
waves in a thermo-elastic way by absorbing the pump laser pulses at the surface
of the thin film. The acoustic waves are partly reflected at the interface of
thin film and substrate. Back at the film surface the reflected acoustic wave
causes a change of the optical reflection coefficient, which is measured by the
probe laser pulse. One-dimensional, thermo-elastic models are developed to
investigate the laser-based excitation and propagation of the longitudinal
acoustic pulses in thin aluminium films. The change of the optical reflection
coefficient is governed by the temperature distribution and the mechanical
strain caused by the traveling acoustic pulse. The presented comparison of the
simulation results of thin aluminium films with the pump-probe-measurements
allows to determine film thickness or Young's modulus. Furthermore material
properties like thermal conductivity and photoacoustic properties are estimated.
The thermo-elastic modeling of the two-dimensional case and the resulting new
possibility to use the pump-probe technique for the nondestructive evaluation of
micro-structures is discussed. Further directions of the ongoing research
project are presented.
28.09.2004 | compiled by
Stephan Kaufmann | ZfM
| ETH
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