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Suspension Handling System Sensors and Actuators B63 (2000) 6, 195-200. AbstractA new idea of particle handling is proposed here consisting of a matrix of mechanical gates. The particle sizes that can be handled range from the sub micron scale to a few microns. The suspension handling device consists of a silicon chip encapsulated by two glass chips. A free standing silicone membrane with a thickness of two microns is used to reduce the cross-sections of channels with a size of 40x10 microns. We could show that the flow of micron sized particles in the channels can be monitored and controlled by actuating the valves. The density of valves is 600 valves / square inch in our first prototype. | |||||||||||||
D. Baechi, R. Buser: